SEMI SECS/GEM standard overview

SECS/GEM is a connectivity standard built by members of the International Semiconductor Equipment and Materials Association (SEMI).

This standard is used to establish communication between equipment and factory MES, CIM and other control systems.

SECS/GEM is the semiconductor equipment communication standard in SEMI

Generally speaking, the SECS/GEM standard defines information, state machine and context, equipment and factory selective implementation to enable factory software to control and monitor manufacturing equipment.

achieve

GEM interface

　　GEM Factory Automation provides a framework to monitor and control equipment from a remote host. Allow devices from different vendors
Prepared for automation in manufacturing plants.
The 　　GEM standard defines a basic set of GEM requirements and a set of additional GEM functions. GEM requires every GEM
The interface contains specific elements. However, it encourages each interface to have unique machine-specific elements.

　　In the factory using the SECS/GEM standard, there are both host and equipment. Operating software implemented by the equipment side and complying with SEMI standards. The manufacturer (factory) builds host software that establishes communication with the device interface, and then realizes the control of the device by the factory.

　　The host selectively implements the communication standard because it only sets the expected behavior of the device. If you want to use interfaces and functions, the host and device must implement specific and clear functions and behaviors.

communication

　　 The SECS/GEM SEMI connectivity standard defines how the host and device start to establish communication, and also defines how to re-establish communication when communication is interrupted. The online identification method is responsible for verifying the hardware and software identification of the device. The terminal service function allows the host operator and the equipment operator to exchange manually entered text on the console.

control

　　 The SECS/GEM SEMI connectivity standard summarizes the control status model of the level of cooperation between the host and the equipment operator. The device provides three basic levels of host control:Offline, online/local, and online/remote, Determine the host's ability to control and monitor equipment. The equipment operator sets the level of host control. The remote control function allows the host to sendInstructions such as "start", "stop", "pause", "continue" and "interrupt" to control the working process of the equipment。

Operation notice

　　Collect events and alarm functions to enable the host to monitor the operation of the equipment. The device event collection function notifies the host of important normal and abnormal activities. When a potentially dangerous activity occurs and is subsequently cleared, the device alarm function will notify the host. The host sets which collection events and alarms need to be notified. The SECS/GEM connectivity standard requires that certain events must be notified, but generally additional events are defined for the device so that the host can monitor specific device-related activities.

　Event report

　　 The host can configure the device to automatically send data in reports when the device is in a certain state. This powerful data collection method can collect more data.

Process program management

　　Processing program management provides a method for transferring processing programs between the host and the device. The host can also query the list of available process programs and delete the process programs.

Device control and configuration

　　GEM allows the host to control and configure the machine.

Remote command

　　Each GEM interface defines a set of remote commands. The machine can also implement custom commands.

Equipment constant

　　Each GEM interface defines a set of constants required by GEM. Device constants can configure the behavior of device software and hardware.

A piece of realization

// Alarm Settings
        public void AlarmSet(int ALID, bool bSet)
        {
            // eq_alarm_set, ALID, set
            string cmd = "";
            CListOperate.listAppend(ref cmd, ALID.ToString(), bSet ? "1" : "0");
            m_pImpl.toolCmd(cmd);
        }

// // Alarm acquisition list
        public List<AlarmInfo> AlarmGetList()
        {
            // eq_alarm_get_list
            // ALID, ALTX, Enable, Set

            string cmd = "";
            RcResult reply;
            reply = m_pImpl.toolCmdReply(cmd);

  // Analyze ​​ ​​
            List<AlarmInfo> listInfo = new List<AlarmInfo>();
            if (reply.rc == 0 && reply.result != null)
            {
                string[] listAlarm = null;
                string[] element = null;
                CListOperate.listSplit(reply.result, ref listAlarm);

                for (int i = 0; i < listAlarm.Length; i++ )
                {
                    CListOperate.listSplit(listAlarm[i], ref element);
                    if (element != null && element.Length > 3)
                    {
                        AlarmInfo info = new AlarmInfo();
                        info.ALID = element[0];
                        info.ALTX = element[1];
                        info.bEnable = element[2]=="1"?true:false;
                        info.bSet = element[3] == "1" ? true : false;
                        listInfo.Add(info);
                    }
                }
            }
            return listInfo;
        }

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Equipment host computer communication solution

 

1. The golden pumpkin secs/gem program provides a real-time, bidirectional program that achieves millisecond-level processing speed, allowing you to coordinate and interact with the factory more smoothly and smoothly.

2. To relieve the trouble of communication among equipment engineers, the host computer program does not need to pay too much attention to the realization of secs/gem. Golden Pumpkin Technology allows you to focus on equipment design and improve competitiveness

3. Provide equipment with SECS/GEM communication protocol functions, free and efficient DMS SML language support.

Software goals

Golden Pumpkin Technology aims to build for enterprisesHigh-efficiency, intelligent and visual system

Realize digital interworking with EAP and MES, intelligently manufactured equipment

Intelligent equipment for Industry 4.0

Company strength

1. Rich experience in intelligent manufacturing of large enterprises

2. Countless successful cases of semiconductor and new energy equipment

3. Top-level secs/gem solution

4. Comprehensive project implementation capabilities

Connection mode:

Control mode

Device control status

Once automatic control is to be implemented, the control chart can be used.

Manufacturing resources are too blocked! In many cases, the difficulty is not the development task, but the difficulty is the process of finding information. It does not have various open source codes like the Internet, and can directly stand on the shoulders of the predecessors and continue to move forward. The development of the manufacturing industry is bound to be a combination of information technology and automation technology. What is needed is a comprehensive talent with both. Or hope that the manufacturing industry will develop one day.